PLASMA TREATMENT APPARATUS, MATCHING BOX, IMPEDANCE MATCHING DEVICE, AND COUPLER

摘要

A matching box has a contact device insertion unit as an insertion opening for a contact device. When the matching box is fixed to a side external wall of a vacuum vessel, positioning is performed with a spatial margin in the space around a feeding stick. After this, the contact device is inserted into the contact device insertion unit, thereby establishing an electric contact between an external circuit and the feeding stick. Moreover, a socket (40) arranged at the output portion of an impedance matching device has an engagement hole (41) for engaging with and holding the feeding stick (32) in the center of a metal body (40a) formed in a cylindrical shape. On the inner wall of the engagement hole (41), there is provided a film layer (42) made of an insulator, thereby electrically insulating from the feeding stick (32). A high-frequency power generated by a second high-frequency power source (51) is transmitted to the feeding stick (32) by induction coupling.