发明名称 SAMPLE INSPECTION METHOD
摘要 PROBLEM TO BE SOLVED: To provide a new sample inspection method capable of being flexibly and freely programmed under the use of coloring matters, which are different in absorption characteristics and radiation characteristics only extremely slightly and can be measured and displayed separately by the image forming system of a microscope, by spectrally splitting the radiation rays from samples at a plurality of sample points, that is, distribution points by the operation of a laser scanning microscope, a fluorescent type inspection device or a fluidizing cell meter. SOLUTION: A spectrum distribution is measured by individual detection channels and the signals thereof are alloted to detection signals having at least one of position coordinates x, y and z or a measuring point (t) of time and preserved to form aλstack. ROI is marked as a sample region to be inspected, which has a feature for forming a false color image on the basis of an image channel distributed corresponding to a color or spectrum region and a color distribution, by an input means or automatically. COPYRIGHT: (C)2003,JPO
申请公布号 JP2003185581(A) 申请公布日期 2003.07.03
申请号 JP20020294757 申请日期 2002.10.08
申请人 CARL ZEISS JENA GMBH 发明人 WOLLESCHENSKY RALF;ZIMMERMANN BERNHARD;TILLE SEBASTIAN
分类号 G01J3/28;G01J3/44;G01N21/64;G02B21/00;(IPC1-7):G01N21/64 主分类号 G01J3/28
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