| 摘要 |
PROBLEM TO BE SOLVED: To provide a metal mask which has an improved structure of the wall face and can manufacture a product having a precisely same pattern as that of the bottom face of the metal mask. SOLUTION: A method for manufacturing the metal mask having an inverted trapezoid hole comprises arranging a layer of a photo-curing resin, on both faces of the base metal provided with a separated layer of a metal C the etching characteristics of which are different from those of a metal A, on the bottom face of a metal A body layer consisting of the metal A; printing the bottom layer into the shape for forming the pattern, and the top layer into the shape for etching the base metal; electrodepositing a pattern layer of a metal B the etching characteristics of which are different from those of the metal C, from the bottom side; and etching the metal A body layer consisting of the metal A, and subsequently etching the separated layer consisting of the metal C, from the top side. COPYRIGHT: (C)2003,JPO
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