| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for controlling an exhaust gas flow rate during discharge plasma treatment which provides a constant exhaust gas flow rate in an exhaust pipe, even when the exhaust pipe is blocked up with depositions of unreacted gas. <P>SOLUTION: In a discharge plasma treatment method, a treatment gas is fed between a pair of electrodes, at least one of which has its surface facing the other electrode coated with a solid dielectric, to apply an electric field and generate glow discharge plasma for treating a substrate, and the treated exhaust gas is subsequently recovered. Here, the flow rate in the exhaust pipe is controlled via a control valve positioned between the inlet and the downstream area of the exhaust pipe, based on the differential pressure measured between these areas. <P>COPYRIGHT: (C)2003,JPO |
