发明名称 |
Wafer cassette |
摘要 |
A wafer cassette comprises a case body and an adapter that supports substrates. There are adapters of various types corresponding to the size of the substrates to be supported. The case body and the adapter of any type are united in a manner such that fitting portions of the case body are fitted individually in fitting holes of the adapter.
|
申请公布号 |
US2003122146(A1) |
申请公布日期 |
2003.07.03 |
申请号 |
US20020320685 |
申请日期 |
2002.12.17 |
申请人 |
IIJIMA TOSHIHIKO;AKIYAMA SHUJI;OBAYASHI TADAHIRO |
发明人 |
IIJIMA TOSHIHIKO;AKIYAMA SHUJI;OBAYASHI TADAHIRO |
分类号 |
B65D85/86;H01L21/673;(IPC1-7):H01L33/00 |
主分类号 |
B65D85/86 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|