| 摘要 |
Signal propagation times TA1, TA2, TA3 . . . of respective pin selection paths of a pin selection device that selectively connects output pins of a semiconductor device testing apparatus to a timing measurement device are measured in advance, and the measured values are memorized. At the time of timing calibration, calibration pulses are transmitted to a timing calibrators via respective test pattern signal transmission paths and respective pin selection paths to measure delay time values T1, T2, T3, - - - of respective channels. The known values TA1, TA2, TA3, - - - are subtracted from the measured values T1, T2, T3, - - - , respectively. A timing calibration is performed by adjusting delay time values of the timing calibrators of the respective test pattern signal transmission paths such that each of the respective differences between the TA1, TA2, TA3, - - - and the measured values T1, T2, T3 - - - become a constant value TC.
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