MULTI-LAYER BURNER MODULE, ADAPTER, AND ASSEMBLY THEREFOR

摘要

A burner module (10) for delivering a flow of chemical reactants to a combustion site of a chemical vapor deposition process includes a plurality of substantially planar layers (210,230,240,31,320,330,340,350,360,370). The substantially planar layers (210,230,240,31,320,330,340,350,360,370) are arranged in a generally parallel and fixed relationship and define an inlet (110,120,130,140,150), an outlet (372A, 372B, 372C, 372D, 372E) and a passage (114A, 114B, 114C, 114D, 114E) fluidly connecting the inlet and the outlet. A least one of the layers is a distribution layer (330,350) having a plurality of apertures (334B, 334E) therethrough and fluidly communicating with the passage. The plurality of apertures collectively define a non-uniform pattern arranged and configured to improve the uniformity of flow out through the outlet. Burner adapter and assembly (10) embodiments are also included.