Aqueous dispersion used for chemical-mechanical polishing of oxide surface, preferably silica, contains pyrogenic silica powder doped with alumina from aerosol with specified particle size

摘要

In aqueous dispersion for chemical-mechanical polishing of oxide surfaces, containing a powder of pyrogenic silica doped with alumina by means of an aerosol, the powder contains 0.01-3, preferably 0.2-1.5 weight percent (wt.%) alumina and the average particle diameter of the dispersion is not more than 0.1 microns. An Independent claim is also included for production of the dispersion by dispersing the doped silica in an aqueous medium with an energy input of not less than 200 kJ/m3.