| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a sample inspection device capable of accurately detecting the current flowing through a sample, and an inspection method using the same. <P>SOLUTION: The sample inspection device is constituted so that the surface of the sample held to the sample moving mechanism arranged in a sample chamber in an insulated state is irradiated with a primary beam, the current flowing through the sample as a result is detected, and the sample is inspected on the basis of the obtained detection signal. This apparatus is equipped with a differential amplifier for differentially amplifying the signal obtained by detecting the current flowing through the sample, and the signal from the conductive partition member inserted in the gap between the sample and the sample moving mechanism so as to partition both of them in a state insulated from them. The output of the differential amplifier is measured to calculate the difference between the measured value at the on-time of the primary beam and the measured value at the off-time thereof. <P>COPYRIGHT: (C)2003,JPO</p> |
