| 摘要 |
PROBLEM TO BE SOLVED: To provide an insulating coating composition which can obtain a low dielectric constant film at a low curing temperature in a short period of time. SOLUTION: The insulating composition comprises at least one silane compound to be selected from alkoxysilanes, their hydrolyzates, and their condensates, an organic polymer and a nonionic surface active agent. A hydrophilic group contained in the nonionic surface active agent has a structure of formula (1): -CO-NR<SP>2</SP>R<SP>2</SP>or formula (2): -R<SP>3</SP>-NOR<SP>4</SP>R<SP>5</SP>(wherein R<SP>1</SP>is a monovalent organic group; R<SP>2</SP>is a hydrogen atom or a monovalent organic group; R<SP>4</SP>and R<SP>5</SP>are each a monovalent organic group; and R<SP>3</SP>is a divalent organic group). COPYRIGHT: (C)2003,JPO
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