| 摘要 |
PROBLEM TO BE SOLVED: To improve the corrosion resistance in a hydrochloric acid corrosive atmosphere of a reflector for a vapor deposition apparatus. SOLUTION: The reflector 11 is manufactured by forming an intermediate layer 13 on a parent material 12 made of Cu through Ni plating, and further forming a reflection coating film 14 thereon through Au plating. Here, Cu composing the parent material 12 has a more noble corrosion potential compared to that of Ni composing the intermediate layer 13. The corrosive potentials of these layers become nobler in the order of the intermediate layer, the parent material and the reflection coating film. COPYRIGHT: (C)2003,JPO
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