CERIUM OXIDE COATED SILICA PARTICLES AND METHOD FOR PRODUCTION THEREOF
摘要
The present invention relates to a method for preparing cerium oxide coated silica particles and cerium oxide silica particles obtainable by the method. The invention further relates to cerium oxide coated silica particles and the use thereof for polishing.
申请公布号
WO03054096(A1)
申请公布日期
2003.07.03
申请号
WO2002SE02238
申请日期
2002.12.05
申请人
AKZO NOBEL N.V.;EKA CHEMICALS AB;TOKARZ, BOZENA, STANISLAWA;LARSSON, KENNETH, OLOF
