| 摘要 |
<p>The invention concerns rate gyros with micromachined oscillating system in a silicon substrate. The invention discloses an original oscillating system with two mobile masses (14 and 14'), linked by a vibrational energy coupling structure ( transverse arms (26, 26'), longitudinal arms (22, 22'), and short transverse attachment (24) between the longitudinal connections (22, 22')). The mobile masses are further suspended to U-shaped flexural arms (13) having one branch end linked to the mass and another end linked to a fixed anchorage point (18). The flexural arms are not interposed between the coupling structure and the mass but are independent of the coupling structure. The masses are excited in vibration in their plane by electrostatic forces applied with interdigital parts (11). The Coriolis forces cause them to vibrate perpendicularly to the plane and said vibration is detected by electrodes forming part of the mobile masses. The invention is useful for measuring angular speeds in aeroplanes, motor vehicles, robots and the like.</p> |
