METHOD AND DEVICE FOR CLEANING FUNCTIONAL LIQUID EJECTION HEAD, METHOD OF MANUFACTURING LIQUID CRYSTAL DISPLAY DEVICE, METHOD OF MANUFACTURING ORGANIC EL DEVICE, METHOD OF MANUFACTURING ELECTRONIC EMITTING DEVICE, METHOD OF MANUFACTURING PDP DEVICE, METHOD OF MANUFACTURING ELECTROPHORESIS DISPLAY DEVICE, METHOD OF MANUFACTURING COLOR FILTER, METHOD OF MANUFACTURING ORGANIC EL, METHOD OF FORMING SPACER, METHOD OF FORMING METALLIC WIRING, METHOD OF FORMING LENS, METHOD OF FORMING RESIST, AND METHOD OF FORMING LIGHT DIFFUSING BODY

摘要

PROBLEM TO BE SOLVED: To prevent isolation of functional liquid and clogging of a nozzle when the functional liquid is ejected by surely cleaning a functional liquid drop ejection head.

SOLUTION: A pure water tank 202, an alcohol tank 203, and a solvent tank 204 are connected to an inlet connection attachment 5 to be connected to a functional liquid inlet of the functional liquid drop ejection head mounted on a head unit 1 with a flow-in pipe therebetween and a suction pump 225 is connected to a nozzle connection attachment 7 to be connected to an ejection nozzle of the functional liquid drop ejection head with a flow-out pipe 226 therebetween, and then the pure water, the alcohol and the solvent as a cleaning liquid is sequentially injected thereinto. The flowing speed of the cleaning liquid is raised or lowered by opening or closing a cleaning accelerating valve 219 provided at the flow-in side and a bubble is mixed in the cleaning liquid by opening or closing a bubble mixing valve 221. Each of the alcohol and the solvent is reused to be circulated.

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