| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for removing a decomposed material or dust of a polyimide film, adhered to the surface of the film after the film is discharge treated such as corona discharge treated, plasma discharge treated or the like. SOLUTION: The method for removing the dust of the polyimide film comprises the steps of discharge treating the film, then removing a foreign matter adhered to the film. The method further comprises the steps of disposing a first adhesive roller after a discharging unit, and supplying the film after the discharging treatment to the first roller. The method also comprises the steps of bringing a second adhesive roller having a higher adhesive force than that of the first roller into contact with the first roller, and removing the foreign matter on the surface of the first roller. COPYRIGHT: (C)2003,JPO |
