发明名称 DEVICE AND METHOD FOR MODIFYING THE SURFACE OF A WORKPIECE USING PHOTONIC RADIATION
摘要 The invention relates to a device and a method for modifying the surface (1') of a workpiece using photonic radiation (2), especially laser radiation. Said device comprises a radiation source (3) and a mask device, said mask device being configured by a support (7), permeable to the radiation (2), to whose side facing the workpiece (1) individual lens elements (9) are adhered and the radiation (2) is bundled into partial beams (10) by the individual lens elements (9).
申请公布号 WO03054630(A2) 申请公布日期 2003.07.03
申请号 WO2002AT00354 申请日期 2002.12.18
申请人 BAEUERLE, DIETER;INNOVATIONSAGENTUR GESELLSCHAFT M.B.H.;PIGLMAYER, KLAUS 发明人 BAEUERLE, DIETER;PIGLMAYER, KLAUS
分类号 B23K26/06;B23K26/066;B23K26/067;G03F7/20;(IPC1-7):G03F7/20 主分类号 B23K26/06
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