| 摘要 |
<p>In known single probe scanning X-ray microscopes a very thin X-ray beam is selected from X-rays generated by an X-ray source. This known technique has the drawback that very few photons only take part in irradiating the sample. Therefore, high intensity sources have to be used, such as very big and expensive synchrotron sources, or very long exposure times (100 hours) have to be accepted. According to the invention it is proposed to irradiate the sample (10) by means of radiation which is selected from the source X-ray beam (4) by means of a lattice plate (6), thus providing a plurality of N probe-forming X-ray beams selected from the main beam (4). This results in an improvement of the exposure time by a factor of N.</p> |
