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发明名称
Sputtertargetmaterial
摘要
申请公布号
DE19981314(C2)
申请公布日期
2003.07.03
申请号
DE1999181314
申请日期
1999.06.16
申请人
TANAKA KIKINZOKU KOGYO K.K., TOKIO/TOKYO
发明人
HARA, NORIAKI;YARITA, SOMEI;HAGIWARA, KEN;MATSUZAKA, RITSUYA
分类号
C23C14/34;(IPC1-7):C23C14/34;H01L21/285
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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