VACUUM ABSORPTION PLATE OF EXPOSURE APPARATUS FOR PRINTED CIRCUIT BOARD STACKED BY PHOTOSENSITIVE RESIST AND MASK CARRIER APPARATUS

摘要

PURPOSE: A vacuum absorption plate is provided to form an accurate fine pattern by easily fixing an exposure mask by a magnet operation between a permanent magnet and a fixing part. CONSTITUTION: A fixing part is configured to fix an exposure mask(4) which has an exposure film in a mask region on a transparent mask carrier(5). A vacuum absorption plate(2) is configured to fix a printed circuit board(1). The first grooves(6) are inserted in the mask carrier(5) placed at an edge of the mask region. The grooves(6) are filled up with a permanent magnet material(7) so as to have the same height with respect to a surface of the mask carrier. In case of the permanent magnet material(7), ferromagnetic fixing pierces(8) are provided which can be fixed on the permanent magnet material(7) with the pierces being placed at the center of the exposure mask.