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发明名称
METHOD FOR FORMING FILM BY PLASMA POLYMERIZATION AND APPARATUS FOR FORMING FILM BY PLASMA POLYMERIZATION
摘要
申请公布号
EP0935011(A4)
申请公布日期
2003.07.02
申请号
EP19970950416
申请日期
1997.12.26
申请人
TDK CORPORATION
发明人
TAKAI, MITSURU;MIYAZAKI, SHINJI;UEDA, KUNIHIRO;KANAZAWA, HIROMICHI
分类号
B05D7/24;C08F2/46;C23C14/12;C23C14/56;(IPC1-7):C23C14/12
主分类号
B05D7/24
代理机构
代理人
主权项
地址
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