PULLING ASSEMBLY INSTALLED IN DISC SITE OF ION IMPLANTING EQUIPMENT

摘要

PURPOSE: A pulling assembly installed in a disc site of an ion implanting equipment is provided to be capable of preventing the generation of the gap between a wafer and the disc site by using a sliding pin including a tilted surface formed body part. CONSTITUTION: A pulling assembly is provided with a sliding pin and a pulling rod(310). The sliding pin includes a body part(350) for fixing a wafer on a disc site(200) by pushing the wafer to the fence(250) of the disc site, a tilted surface(357) formed on the lateral wall of the body part for sliding the wafer toward the disc site by inducing the edge portion of the wafer to contact the lateral wall, and a head part(355) located on the upper portion of the body part. Preferably, the tilted surface of the lateral wall of the body part has a slope of 10 degrees.