Shaft seal structure for vacuum pump

摘要

A vacuum pump has a housing accommodating a rotary shaft and a gas transferring assembly driven by the rotary shaft. The housing has an exhaust passage for exhausting gas outside the housing. The gas transferring assembly creates a vacuum. A lip seal for shaft seal is disposed between a pump chamber communicating with the exhaust passage and a region in which oil exists so as to slide relative to a circumferential surface of the rotary shaft. The lip seal has a back pressure surface in a back pressure region facing the pump chamber and a pressure surface facing the region in which the oil exists. A communicating passage in the housing intercommunicates the back pressure region and the exhaust passage for applying at least substantially the pressure in the exhaust passage to the back pressure surface.