TEMPERATURE CONTROLLER OF SPINNER EQUIPMENT

摘要

PURPOSE: A temperature controller of spinner equipment is provided to be capable of simultaneously and uniformly controlling the temperature of chemicals supplied from a plurality of chemical supply nozzles. CONSTITUTION: The aiming temperature of a plurality of chemical pipes is calculated by a water temperature calculating part(262) for uniformly controlling the temperature of chemicals supplied from a plurality of chemical supply nozzles. The water flowing through a plurality of water pipes is heated by using a heating part(266) for increasing the temperature of the water to the aiming temperature calculated by the water temperature calculating part(262). The water flowing through water pipes is cooled by using a cooling part(268) for decreasing the temperature of the water to the aiming temperature calculated by the water temperature calculating part. The temperature of the water flowing water pipes is controlled by a plurality of water temperature controlling part(264a,264b,264c).