METHOD FOR TRANSFERRING WAFER USING TRANSFER MEANS

摘要

PURPOSE: A method for transferring a wafer using transfer means is provided to be capable of preventing the damage of wafers by sequentially loading wafers into designated slots of the second cassette corresponding to each slot of the first cassette according to the order of wafers drawn from the first cassette. CONSTITUTION: The first and second cassette are located at the first and second loadlock chamber, respectively. The one-to-one correspondence between slots of the first cassette and those of the second cassette, is designated(S1). That a wafer is drawn from one slot of the first cassette by transfer means, is recognized(S3). The wafer drawn from one slot of the first cassette is loaded into the corresponding slot of the second cassette(S5).