| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for forming a thin and even planar ceramics, and a method for manufacturing a small-sized actuator where such a thin film ceramics is formed on a structure on which a three-dimensional processing is performed beforehand. <P>SOLUTION: A ceramic powder, a proper quantity of binder, a surfactant and an organic solvent are mixed and stirred to prepare a slurry, and the slurry is formed and sintered on a green sheet with a doctor blade device. In addition, the green sheet is attached to the structure comprising a silicon on which the three-dimensional processing is performed beforehand and the like, and the green sheet and the structure are simultaneously bonded at a time when they are sintered to manufacture the actuator. <P>COPYRIGHT: (C)2003,JPO |
