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发明名称
Semiconductor DRAM trench capacitor
摘要
申请公布号
EP0967653(A3)
申请公布日期
2003.07.02
申请号
EP19990304810
申请日期
1999.06.18
申请人
SIEMENS AKTIENGESELLSCHAFT;INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
SCHREMS, MARTIN;SCHAEFER, HERBERT;MANDELMAN, JACK;STENGL, REINHARD;HOEPFNER, JOACHIM
分类号
H01L27/04;H01L21/822;H01L21/8242;H01L27/108;H01L29/94;(IPC1-7):H01L27/108;H01L21/824
主分类号
H01L27/04
代理机构
代理人
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地址
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