| 摘要 |
PROBLEM TO BE SOLVED: To quickly and easily set a vacuum suction pad to a transportation apparatus without adjusting the vacuum suction pad in-situ by making the vacuum suction pad so as to be exactly settable beforehand. SOLUTION: The apparatus for setting a vacuum suction pad is composed of a mounting frame 13 supported by a portal column 2 so as to adjust its height, a gyro supporting base 70 for supporting a fixing plate 78 such that its tilting angle is adjustable in all directions, and a two-dimensionally movable supporting mechanism 50 arranged under the mounting frame 13 to support the gyro supporting base so as to two-dimensionally move in a horizontal plane. A base portion 32 of an articulated arm 30 having the vacuum suction pad 31 arranged at the tip end thereof is fixed to the mounting frame. The vacuum suction pad is placed on the fixing plate by freely bending and stretching the articulated arm. In this state, the respective articulations 35, 36, 39, 40 of the articulated arm are fixed. Thus, the position and the tilting angle of the vacuum suction pad can be exactly set. COPYRIGHT: (C)2003,JPO
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