| 摘要 |
PROBLEM TO BE SOLVED: To eliminate such a problem that a conventional hot plate having a cooling mechanism becomes bulky because a U-shaped pipe section protrudes to the outside of a treating plate. SOLUTION: On this block-shape hot plate, holes extending in a first direction and a second direction which cross and communicate with a heater are formed. The holes extending in the first direction are constituted of first hole elements which are formed on one side of the hot plate, and second and third hole elements being adjacent with each other which are formed on the other side. The holes extending in the second direction are constituted of at least four lines of first to fourth hole elements which are adjacent with each other. One-side ends of the second and third hole elements are respectively communicated with a cooling water inlet and an outlet pipe. The other ends of the second and third hole elements, both ends of the first hole elements and both end sections of the hole elements extending in the second direction are closed with a plug. Then, intermediate sections of the first hole elements are closed with a round plug at locations between the second and third hole elements extending in the second direction. Then, intermediate sections of the hole elements connected with the cooling water outlet pipe are closed with the round plug, and thus, a zigzag shape channel is formed. COPYRIGHT: (C)2003,JPO
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