| 摘要 |
A method of manufacturing a piezoelectric ceramic device having excellent piezoelectric characteristics and high reliability is described. The method includes the steps of coating conductive paste containing Ag as a main component on each of a plurality of ceramic green sheets each containing a piezoelectric ceramic material, laminating the plurality of ceramic green sheets to form a laminate, and burning the laminate under an atmospheric condition in which the oxygen concentrations in a heating process and a retention process are about 21% by volume or more, and the oxygen concentration in a cooling process is about 0.05% by volume to 3% by volume. |
