发明名称 |
Via/line inductor on semiconductor material |
摘要 |
A spiral inductor Ä122Ü, and manufacturing method therefore, is provided including a substrate Ä112Ü and an inductor dielectric layer Ä114Ü over the substrate Ä112Ü having a spiral opening provided therein. A spiral inductor Ä122Ü is in the spiral opening with the spiral inductor Ä122Ü including a plurality of parallel spiral vias Ä144Ü Ä148Ü connected together at center proximate and center distal ends of the spiral inductor Ä122Ü. |
申请公布号 |
EP1324375(A2) |
申请公布日期 |
2003.07.02 |
申请号 |
EP20020257729 |
申请日期 |
2002.11.07 |
申请人 |
CHARTERED SEMICONDUCTOR MANUFACTURING LTD. |
发明人 |
ZHANG, JIONG;WANG, YI MIN;CHU, SHAO-FU SANFORD |
分类号 |
H01L21/822;H01L21/02;H01L27/04;H01L27/08;(IPC1-7):H01L21/02 |
主分类号 |
H01L21/822 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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