发明名称 METHOD AND DEVICE FOR ALIGNMENT
摘要 <p>A method and a device for alignment; the method for aligning the position of a first connected material relative to the position of a second connected material having a coating material, comprising the steps of recognizing the position of a mark for the first connected material by a recognizing means, displaying, with a recognized position used as a reference, a reference mark representing the position of the first connected material on a screen at a position corresponding to an area on the outside of the coating material of the second connected material, recognizing the position of a mark for the second connected material put on the outside of the coating material of the second connected material by the recognizing means, displaying the recognized position on the screen, and correcting the position of the second connected material so that the position of the mark for the second connected material comes within an allowable limit relative to the position of the reference mark, whereby, even when one connected material has the coating material, the relative position of both connected materials can be surely and easily adjusted within the allowable limit.</p>
申请公布号 KR20030055315(A) 申请公布日期 2003.07.02
申请号 KR20037006847 申请日期 2003.05.21
申请人 发明人
分类号 G01B11/00;H01L21/50;G03B15/00;G12B5/00;H01L21/60;H01L23/544 主分类号 G01B11/00
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