ROBOT ARM LEVELER OF WAFER TRANSFER APPARATUS

摘要

PURPOSE: A robot arm leveler of a wafer transfer apparatus is provided to transfer stably a wafer by controlling a horizontal level of a robot arm for supporting the wafer by means of a block body. CONSTITUTION: A wafer transfer apparatus(10) includes a driving arm(16) and a robot arm(20). One side of the driving arm is vertically supported by a support shaft of a robot body(12). The other side of the driving arm is vertically supported by a driven shaft. A robot arm leveler of the wafer transfer apparatus includes a block body(30) for identify positions of each side portion of the robot arm. The block body includes a support block(32) and an indicative block(34). The support block is formed on an upper surface of the driving arm. The indicative block is projected from an upper portion of the support block.