发明名称 |
Positioning apparatus used in a process for producing multi-layered printed circuit board and method of using the same |
摘要 |
The Xray irradiation device 1 issues Xrays to board mark 7 and projects the image of the board mark 7 on the fluorescence screen 3, the fluorescence face 39 of which visibly displays the image of the board mark 7 that can be captured by the CCD camera 2. The CCD camera 2 images the board mark 7 and the mask mark 5 depicted on the photo mask 4 overlapping together. The board 6 and the photo mask 4 are aligned by exposure stage 8 so as to the board mark 7 and the mask mark 5 coincide. <IMAGE> |
申请公布号 |
EP1139706(A3) |
申请公布日期 |
2003.07.02 |
申请号 |
EP20010107455 |
申请日期 |
2001.03.27 |
申请人 |
ADTEC ENGINEERING CO., LTD. |
发明人 |
SANGU, KATSUYA;IDA, RYOICHI;MOMOSE, KATSUMI;KODA, MICHITOMO |
分类号 |
G03F7/20;B23K26/00;B23K26/02;B23K26/38;B23K101/42;G03F9/00;H05K1/02;H05K3/00;H05K3/46 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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