| 摘要 |
PURPOSE: A vacuum pressure sensing apparatus of a picker is provided to be capable of minimizing the time of an unloading process by sensing vacuum pressure and vacuum cancellation pressure using a sensor in real time while transferring a device or electronic part. CONSTITUTION: A pad(4) is fixed on the lower portion of a hose connecting part(11). A loading groove(12) is connected through an air supply line(11a) and a through hole(13) to the hose connecting part(11). A sensor(14) is installed in the loading groove(12) for sensing vacuum pressure and vacuum cancellation pressure. A signal wire(15) is electrically connected between the sensor(14) and a vacuum sensing sensor unit for transmitting the information of the detected vacuum pressure and vacuum cancellation pressure.
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