发明名称 Device structure that combines insulating materials for alignment posts and optical interference layers
摘要 A method of forming an improved liquid-crystal-on-silicon display and resultant display is described, in which the device structure is enhanced by the photolithography building of alignment posts among the mirror pixels of the microdisplay.
申请公布号 US6587178(B2) 申请公布日期 2003.07.01
申请号 US20010978226 申请日期 2001.10.16
申请人 CHARTERED SEMICONDUCTOR MANUFACTURING LTD. 发明人 JIE SU YONG;YALAMANCHI RAVI SANKAR;GANG HAN ZHI
分类号 G02B1/11;G02F1/1335;G02F1/1339;G02F1/136;G02F1/1362;G03F7/20;G09F9/00;(IPC1-7):G02F1/133 主分类号 G02B1/11
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