| 摘要 |
A first displacement mechanism disposed on the axially lower side includes a first piston, a piston rod displaceable integrally with the first piston, and a diaphragm connected to the piston rod. A second displacement mechanism disposed on the axially upper side includes a second piston for moving the piston rod to slide along a through-hole. A displacement amount of the first piston and a displacement amount of the second piston are different.
|
