发明名称 |
Abnormality-cause identifying apparatus and method |
摘要 |
Disclosed is an abnormality-cause identifying apparatus including: a retrieving unit for retrieving quality data conforming to retrieving conditions; and a computing unit for computing mean values and standard deviations of the retrieved quality data, the computing unit further computing the likelihood of abnormality of each of manufacturing apparatuses, on the basis of the mean values and the standard deviations.
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申请公布号 |
US6587801(B2) |
申请公布日期 |
2003.07.01 |
申请号 |
US20010759447 |
申请日期 |
2001.01.16 |
申请人 |
MITSUBISHI DENKI KABUSHIKI KAISHA |
发明人 |
FUNAKOSHI HARUO |
分类号 |
G01N37/00;G05B19/418;G05B23/02;G06F19/00;H01L21/02;H01L21/66;(IPC1-7):G01N37/00 |
主分类号 |
G01N37/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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