发明名称 |
METHOD FOR OPTICALLY DETECTING LOCAL DEFECTS IN A PERIODIC STRUCTURE |
摘要 |
An original value of continuously-updated sections of a period (or interval) are compared with those of at least two corresponding sections of other periods. The median of observed original values is determined. A comparative procedure establishes a difference image of the values. The difference image is employed to evaluate the local defect. |
申请公布号 |
AU2002361053(A1) |
申请公布日期 |
2003.06.30 |
申请号 |
AU20020361053 |
申请日期 |
2002.12.11 |
申请人 |
BASLER AG |
发明人 |
WOLFRAM LAUX |
分类号 |
G02F1/13;G06T7/00;G06T7/40;G09G3/00 |
主分类号 |
G02F1/13 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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