| 发明名称 |
METHOD FOR PRODUCTION OF DIELECTRIC LAYERS USING POLYFUNCTIONAL CARBOSILANES |
| 摘要 |
A process for producing dielectric layers with low dielectric constants by thermal treatment of a sol-gel product of a multifunctional carbosilane, corresponding layers, and their use in the production of electronic components, are described. |
| 申请公布号 |
AU2002366351(A1) |
申请公布日期 |
2003.06.30 |
| 申请号 |
AU20020366351 |
申请日期 |
2002.12.06 |
| 申请人 |
BAYER AKTIENGESELLSCHAFT |
发明人 |
DETLEF GAISER;HARALD KRAUS;UDO MERKER;STEPHAN KIRCHMEYER |
| 分类号 |
H05K1/03;C09D5/25;H01L21/312;H01L21/316;H01L21/768;H01L23/498;H01L23/532;H05K1/00;H05K3/46;(IPC1-7):H01L21/312 |
主分类号 |
H05K1/03 |
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