| 摘要 |
PURPOSE: A mask shield assembly is provided to easily perform a maintenance process by using a plurality of insulation plates having the same size and to prevent the insulation plate from being bent in a length direction by forming a furrow in a thick region of the insulation plate. CONSTITUTION: The first mask shield supports a deposition target in a deposition process. The second mask shield is assembled in a position separated from the first mask shield at a uniform interval. A plurality of the first insulation plates are coupled to the first mask shield. A plurality of the second insulation plates(550) are coupled to the second mask shield, contacting the first insulation plate. The plurality of the second insulation plate maintains a uniform interval between the first mask shield and the second mask shield, composed of the same size. The abovementioned constitution elements are connected by a plurality of fixing bolts.
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