| 摘要 |
PURPOSE: A size measurement method is provided to achieve improved accuracy of measurement even when the CCD camera with a low pixel is used. CONSTITUTION: A size measurement method comprises a first step(S10,S20,S30) of dividing analog image signals of an object obtained from a CCD camera into frames, and converting the analog image signals into digital signals; a second step(S40,S50) of obtaining pixels disposed around two edges by processing the digital image signals through an edge detection method; a third step(S60) of calculating variables by using the positions and values of the pixels obtained around one edge; a fourth step(S70) of deriving a plurality of simultaneous equations by using a least square method, and calculating a quadratic function for the peak value of the pixel by using the derived simultaneous equations; a fifth step(S80) of performing a differentiation on the quadratic function and calculating a peak value from the result of the differentiation; a sixth step of calculating the other peak value by performing the fourth and fifth steps on the pixels obtained around the other edge; and a seventh step(S90) measuring sizes by multiplying a distance per pixel and the difference between the two peak values.
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