| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser irradiation apparatus capable of moving an optical pattern formed with interference action of laser light at a high frequency, and hereby of speeding up a processing speed. <P>SOLUTION: The laser irradiation apparatus comprises laser light generation means 101, splitting means 104 for splitting laser light H generated from the laser light generation means 101, optical interference means 106 for forcing a first light bundle h1 of the laser light H splitted by the splitting means 104 and a second light bundle h2 to interfere with each other, and to form a periodical optical pattern Hp, and a phase shift means 105 for phase shifting the first light bundle h1 electro-optically. The laser light generation means 101 is a pulsed oscillation laser excited by a laser diode. <P>COPYRIGHT: (C)2003,JPO</p> |
