| 摘要 |
PROBLEM TO BE SOLVED: To provide a hot plate unit which can be cooled in a short time while not accompanying structural complexity and size increase. SOLUTION: This hot plate unit 1 is constituted by a hot plate 3 having a resistor 10 at an opening part 4 of a casing 2. A space S1 through which fluid can flow is constituted by the casing 2 and the hot plate 3. A seal structure 14 is arranged between the upper edge of the opening part 4 of the casing 2 and the bottom-face peripheral part of the hot plate 3. COPYRIGHT: (C)2003,JPO
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