| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a slurry supply method and an apparatus therefor which can prevent clogging of a filter and occurrence of scratch. <P>SOLUTION: The apparatus includes a slurry supply line having a filter 2 provided at the last stage of a piping 1 for slurry supply and a slurry solvent valve 8 connected to the slurry supply line for combining slurry passed through the slurry supply line with solvent. <P>COPYRIGHT: (C)2003,JPO</p> |
