| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro-electromechanical sensor accompanied with compensation of parasitic capacitances and spurious displacements. SOLUTION: In this sensor, a fixed body 3 and a movable mass 4 are connected to a first input terminal 102 of a detection circuit, and one or more first detection capacitors 107 and second detection capacitors 108 connected respectively to a first output terminal 104 and a second output terminal 105 are formed, and a rest common detection capacity Cs is provided. The sensor has a step for closing a first negative feedback loop 136 equipped with the first detection capacitors 107, the second detection capacitors 108 and a differentiating amplifier 124, a step for supplying one or more inputs 124b of the differentiating amplifier 124 with a step detection voltage Vs through driving capacitors 121, 122 in order to generate a variationΔVc of the electric driving quantity Vc in reverse proportion to the common detection capacity Cs, and a step for driving the sensor 101 by the electric driving quantity Vc. COPYRIGHT: (C)2003,JPO |
