| 摘要 |
PROBLEM TO BE SOLVED: To provide a table cover or a work bench cover, of which the insulation resistance is approximately 10<SP>7</SP>Ω, also the surface resistance is about 5×10<SP>7</SP>Ω, and the sulfuric acid concentration, which can be extracted, is reduced to even the range, which does not make a work piece corrode. SOLUTION: The table cover or the work bench cover is the table cover or the work bench cover, which consists of a 1st electric conduction layer, which has specific resistance of the range of 5×10<SP>6</SP>Ωcm to 5×10<SP>9</SP>Ωcm, and a 2nd electric conduction layer, which has specific resistance of the range of 5×10<SP>4</SP>Ωcm to 5×10<SP>7</SP>Ωcm. Each the electric conduction layers consist of rubber mixture, contain antistatic additives/or conductive particles, the calendar processing is carried out with together, and they are combined by curing. There, the sulfuric acid concentration, which can be extracted by deionized water, of the table cover or the work bench cover is 100μg/cm<SP>2</SP>or less. COPYRIGHT: (C)2003,JPO
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