发明名称 APPARATUS FOR COLLECTING CONTAMINANTS IN AIR
摘要 PURPOSE: An apparatus for collecting impurities in the air is provided to be capable of accurately measuring the volume of solvent stored in a collecting container and the flow rate of air passing through the collecting container by using a micro balance and a mass flow controller. CONSTITUTION: The predetermined volume of solvent is stored in a collecting container(1). An air suction pipe(3) is installed and inserted into the collecting container(1), wherein the air suction pipe(3) is capable of inhaling the air containing impurities into the collecting container(1). An air exhaust pipe(5) is installed at one side of the collecting container(1) for exhausting purified air bubbles, wherein the purified air bubble is formed by reacting on the solvent. A micro balance(9) is installed on the lower portion of the collecting container(1) for measuring the volume of the solvent. A mass flow controller(11) is connected with the air exhaust pipe(5) for uniformly controlling the flow rate of the exhausted air.
申请公布号 KR20030052516(A) 申请公布日期 2003.06.27
申请号 KR20010082502 申请日期 2001.12.21
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 LIM, CHANG SU;LIM, SUK HUI
分类号 H01L21/02;(IPC1-7):H01L21/02 主分类号 H01L21/02
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