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发明名称
APPARATUS AND METHOD FOR ADJUSTING DENSITY DISTRIBUTION OF A PLASMA
摘要
申请公布号
HK1033292(A1)
申请公布日期
2003.06.27
申请号
HK20010103905
申请日期
2001.06.06
申请人
TOKYO ELECTRON LIMITED
发明人
JOHNSON, WAYNE L.
分类号
H05H1/00;B23K10/00;H01J37/32;H01L21/302;H01L21/3065;H05H1/46;(IPC1-7):B23K
主分类号
H05H1/00
代理机构
代理人
主权项
地址
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