| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a microlens substrate which can be easily manufactured at a low manufacturing cost and which has excellent optical characteristics. <P>SOLUTION: The microlens substrate 1 comprises a microlens forming layer 6 formed on a transparent substrate 5, an intermediate layer 4 formed on the microlens forming layer 6, and a barrier layer 4 formed on the intermediate layer 4. In the microlens forming layer 6, recesses 51 formed on the transparent substrate 5 are filled with a resin constituting the layer 6, to constitute a large number of microlenses 7. The barrier layer 3 is made of ceramics such as SiO<SB>2</SB>. The intermediate layer 4 is made of a polymer material such as a benzocyclobutene resin. <P>COPYRIGHT: (C)2003,JPO |
