Production of an ultrapure solution from an industrial quality chemical product by separating the gaseous and liquid phases in a storage vessel and dissolving the gas in deionised water

摘要

The production of an ultrapure solution of a chemical product from an industrial quality chemical gas includes drawing off the gas into a storage vessel and retaining it in both gaseous and liquid phases, avoiding the formation and/or entrainment of liquid droplets of liquid chemical product and transporting the gaseous phase to a tank to dissolve the gas in deionised water to obtain the solution with the requisite concentration of chemical product. Independent claims are also included for: (a) systems for the production of an ultrapure chemical solution from an industrial quality chemical product; (b) production of an ultrapure solution for the in-situ fabrication of such solutions for cleaning silicon wafers for use in the semiconductor industry; and (c) the production systems for the in-situ fabrication of ultra pure solutions for cleaning silicon wafers for the semiconductor industry.